Field effect transistor and method of manufacturing the same

A p-type nitride compound semiconductor layer is formed on a buffer formed on a substrate. An n-type contact region is formed by ion implantation under a source electrode and a drain electrode. An electric-field reducing layer made of an n-type nitride compound semiconductor is formed on the p-type...

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Bibliographische Detailangaben
Hauptverfasser: Chow, Tat-Sing Paul, Nomura, Takehiko, Niiyama, Yuki, Kambayashi, Hiroshi, Yoshida, Seikoh
Format: Patent
Sprache:eng
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Zusammenfassung:A p-type nitride compound semiconductor layer is formed on a buffer formed on a substrate. An n-type contact region is formed by ion implantation under a source electrode and a drain electrode. An electric-field reducing layer made of an n-type nitride compound semiconductor is formed on the p-type nitride compound semiconductor layer. A carrier density of the electric-field reducing layer is lower than that of the n-type contact region. A first end portion of the electric-field reducing layer contacts with the n-type contact region, and a second end portion of the electric-field reducing layer overlaps with a gate electrode.