Integrated circuit inductor with integrated vias

Integrated circuit inductors are formed by interconnecting various metal layers in an integrated circuit with continuous vias. Using continuous vias improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three...

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Bibliographische Detailangaben
Hauptverfasser: Pitts, Robert L, Baldwin, Greg C
Format: Patent
Sprache:eng
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Zusammenfassung:Integrated circuit inductors are formed by interconnecting various metal layers in an integrated circuit with continuous vias. Using continuous vias improves the Q factor over existing methods for high frequency applications. The contiguous length of the continuous vias should be greater than three percent of the length of the inductor.