Method and device for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method

2 2 The invention relates to a method for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method, according to which a hydrogen-free media flow containing a glass starting material and a carrier gas is fed to a multi-nozzle deposition burner. The glass starti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Schmidt, Richard, Bräuer, Karsten
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:2 2 The invention relates to a method for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method, according to which a hydrogen-free media flow containing a glass starting material and a carrier gas is fed to a multi-nozzle deposition burner. The glass starting material is introduced into a plasma zone by the deposition burner and is oxidized therein while forming SiOparticles, and the SiOparticles are deposited on a deposition surface while being directly vitrified. In order to increase the deposition efficiency, the invention provides that the deposition burner focuses the media flow toward the plasma zone by. A multi-nozzle plasma burner, which is suited for carrying out the method and which is provided with a media nozzle for feeding a media flow to the plasma zone, is characterized in that the media nozzle is designed so that it is focussed toward the plasma zone. The focussing is effected by a tapering of the media nozzle.