Corrector
The invention concerns a corrector for chromatic and aperture aberration correction in an electron microscope with six multipoles which are disposed in the optical path one after the other symmetrically with respect to a symmetry plane for generating quadrupole fields (′) and octupole fields, wherei...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention concerns a corrector for chromatic and aperture aberration correction in an electron microscope with six multipoles which are disposed in the optical path one after the other symmetrically with respect to a symmetry plane for generating quadrupole fields (′) and octupole fields, wherein the quadrupole fields (′) of all six multipoles are consecutively rotated through 90° with respect to one another, thereby generating a mirror-symmetrical exchange symmetry of the axial fundamental rays (xα, yβ).In accordance with the invention, the following is provided for correcting azimuthal coma: |
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