Infrared imaging device and method of manufacturing the same

Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one an...

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Bibliographische Detailangaben
Hauptverfasser: Suzuki, Kazuhiro, Fujiwara, Ikuo, Sasaki, Keita, Kwon, Honam, Yagi, Hitoshi, Honda, Hiroto, Ishii, Koichi, Ogata, Masako, Ueno, Risako, Funaki, Hideyuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.