Memory cell that employs a selectively fabricated carbon nano-tube reversible resistance-switching element, and methods of forming the same

In some aspects, a method of fabricating a memory cell is provided that includes fabricating a steering element above a substrate, and fabricating a reversible-resistance switching element coupled to the steering element by fabricating a carbon nano-tube ("CNT") seeding layer by depositing...

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Bibliographische Detailangaben
1. Verfasser: Schricker, April D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In some aspects, a method of fabricating a memory cell is provided that includes fabricating a steering element above a substrate, and fabricating a reversible-resistance switching element coupled to the steering element by fabricating a carbon nano-tube ("CNT") seeding layer by depositing a silicon-germanium layer above the substrate, patterning and etching the CNT seeding layer, and selectively fabricating CNT material on the CNT seeding layer. Numerous other aspects are provided.