Precursors for CVD silicon carbo-nitride films
xyz Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula SiCN. These aminosilanes, in contrast, to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling....
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| Sprache: | eng |
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| Zusammenfassung: | xyz Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula SiCN. These aminosilanes, in contrast, to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling. In addition, the invention relates to a process for producing such films.The classes of compounds are generally represented by the formulas: |
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