Devices and methods for reducing residual reticle chucking forces

Devices and methods are disclosed for holding an object, particularly a planar object. An exemplary device has a chuck and pressure-changing device. The chuck has an object-mounting surface and a deformable membrane coupled to the object-mounting surface such that conformational changes in the membr...

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Bibliographische Detailangaben

1. Verfasser:	Phillips, Alton H
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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