Electronic device having electrode with high area density and improved mechanical stability

The invention relates to an electric device including an electric element, the electric element comprising a first electrode having a first surface and a pillar, the pillar extending from the first surface in a first direction, the pillar having a length measured from the first surface parallel to t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Guiraud, Lionel, Lecornec, Francois, Klootwijk, Johan H, Roozeboom, Freddy, Chevrie, David D. R
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to an electric device including an electric element, the electric element comprising a first electrode having a first surface and a pillar, the pillar extending from the first surface in a first direction, the pillar having a length measured from the first surface parallel to the first direction, the pillar having a cross section perpendicular to the first direction and the pillar having a sidewall surface enclosing the pillar and extending in the first direction, characterized in-that, the pillar comprises any one of a score and protrusion extending along at least part of the length of the pillar for giving the pillar improved mechanical stability. The electrode allows electrical elements such as capacitors, energy storage devices or diodes to be made with improved properties in a cost effective way.