Table guided by aerostatic bearing elements for vacuum application

A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Schubert, Gerhard, Jackel, Christian, Kirschstein, Ulf-Carsten, Boehm, Michael, Bauer, René, Harnisch, Gerd, Peschel, Thomas, Risse, Stefan, Schenk, Christoph
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.