Methods for site-selective growth of horizontal nanowires, nanowires grown by the methods and nanodevices comprising the nanowires

Methods for site-selective growth of horizontal nanowires, nanowires grown by the methods and nanodevices comprising the nanowires

Methods for the site-selective growth of horizontal nanowires are provided. According to the methods, horizontal nanowires having a predetermined length and diameter can be grown site-selectively at desired sites in a direction parallel to a substrate to fabricate a device with high degree of integr...

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Hauptverfasser: Lee, Eun Kyung, Choi, Byoung Lyong, Kuk, Young, Choi, Je Hyuk, Jung, Hun Huy
Format: Patent
Sprache:eng
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Zusammenfassung:Methods for the site-selective growth of horizontal nanowires are provided. According to the methods, horizontal nanowires having a predetermined length and diameter can be grown site-selectively at desired sites in a direction parallel to a substrate to fabricate a device with high degree of integration. Further provided are nanowires grown by the methods and nanodevices comprising the nanowires.