Mastering tools and systems and methods for forming a cell on the mastering tools
Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the maste...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Mastering tools and systems and methods for forming a cell on the mastering tools are provided. An exemplary method includes emitting a first laser light pulse from a laser for a first predetermined time interval such that at least a portion of the first laser light pulse forms the cell on the mastering tool. The cell has an opening size within a range of 10-100 micrometers and an aspect ratio less than or equal to 1.25. |
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