Advanced process control for new tapeout product

The present disclosure provides a semiconductor manufacturing method. The method includes providing product data of a product, the product data including a sensitive product parameter; searching existing products according to the sensitive product parameter to identify a relevant product from the ex...

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Bibliographische Detailangaben
Hauptverfasser: Hsu, Chih-Wei, Cheng, Yu-Jen, Liu, Wen-Pin, Wang, Shun-Ping, Lu, Shin-Rung, Wang, Jo Fei, Mou, Jong-I, Tsen, Andy, Lin, Chun-Hsien
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides a semiconductor manufacturing method. The method includes providing product data of a product, the product data including a sensitive product parameter; searching existing products according to the sensitive product parameter to identify a relevant product from the existing products; determining an initial value of a processing model parameter to the product using corresponding data of the relevant product; assigning the initial value of the processing model parameter to a processing model associated with a manufacturing process; thereafter, tuning a processing recipe using the processing model; and performing the manufacturing process to a semiconductor wafer using the processing recipe.