Method of making arrays of thin sheet microdischarge devices

4 The cavity defines an empty volume formed in the insulator has its walls defined by the insulator and may extend through either (or both) the first electrode or the second electrode , in which case the first electrode and/or second electrode also define the walls of the cavity . The cavity is preferably cylindrical and has a diameter of 0.1 μm-1 mm. More preferably, the diameter ranges from 0.1 μm-500 μm, 1 μm-100 μm, or 100 μm-500 μm. The cavity will be filled with a gas that contacts the cavity walls, fills the entire cavity and is selected for its breakdown voltage or light emission properties at breakdown. Light is produced when the voltage difference between the first electrode and the second electrode creates an electric field sufficiently large to electrically break down the gas (nominally about 10V-cm). This light escapes from the microcavity through at least one end of the cavity