Device and handling system for measurement of mobility and sheet charge density

An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, a circular waveguide for transmitting microwave power to a sample, such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector for detecting the forward microwave power, a second detector for detecting the microwave power reflected from the sample, and a third detector for detecting the Hall effect power. An automatic positioning subsystem is also provided for allowing automatic positioning of a wafer within the test apparatus. The positioning system includes a first end effector and a rotator-lifter. The first end effector can grasp a sheet element and move it to a desired position within the test apparatus, while the rotator lifter provides incremental adjustment of a theta angle of the sheet element to allow automated mapping of an entire sheet element without the need for manual adjustment of the position of the sheet element. A second end effector can be mounted opposite the first end effector and can be used to automatically position the sheet element within a sheet resistance testing module located at an opposite end of the apparatus.