Apparatus and method for simultaneous treatment of multiple workpieces

A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on re...

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Bibliographische Detailangaben
Hauptverfasser: Zuniga, Steven M, Aqui, Derek G, Nagengast, Andrew J, Guerrero, Keenan Leon, Bolla, Harish K, Agarwal, Aditya
Format: Patent
Sprache:eng
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Zusammenfassung:A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.