Physical failure analysis guiding methods

A method includes providing a plurality of failure dies, and performing a chip probing on the plurality of failure dies to generate a data log comprising electrical characteristics of the plurality of failure dies. An automatic net tracing is performed to trace failure candidate nodes in the failure...

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Bibliographische Detailangaben
Hauptverfasser: Wu, Sunny, Tsen, Yen-Di, Chuang, Monghsung, Huang, Fu-Min, Wang, Jo Fei, Mou, Jong-I
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method includes providing a plurality of failure dies, and performing a chip probing on the plurality of failure dies to generate a data log comprising electrical characteristics of the plurality of failure dies. An automatic net tracing is performed to trace failure candidate nodes in the failure dies. A failure layer analysis is performed on results obtained from the automatic net tracing. Physical failure analysis (PFA) samples are selected from the plurality of failure dies using results obtained in the step of performing the failure layer analysis.