Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

2 RF power is transmitted to a COgas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hauer, Frederick W, Tracy, Patrick T, Austin, R. Russel
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:2 RF power is transmitted to a COgas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.