Method and apparatus for manufacturing trichlorosilane

aa An apparatus for manufacturing trichlorosilane includes a decomposition furnace into which polymers and hydrogen chloride are introduced, the decomposition furnace includes: a heating device which heats an interior of the decomposition furnace ; a reaction chamber which is formed in the decomposition furnace; a center tube which is inserted in the reaction chamber along a longitudinal direction of the reaction chamber and has a lower-end opening portion ; raw-material-supply pipes and which supplies the polymer and the hydrogen chloride to the reaction chamber at an exterior of the center tube ; and a gas-discharge pipe which leads out reacted gas from the center tube , the apparatus further includes a fin that leads the polymer and the hydrogen chloride to the lower-end opening portion of the center tube so as to stir the polymer and the hydrogen chloride.