Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus
A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. |
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