Method for dimension conversion difference prediction, method for manufacturing photomask, method for manufacturing electronic component, and program for dimension conversion difference prediction
A method for dimension conversion difference prediction includes: determining an opening angle at a conversion difference prediction point on basis of a design pattern data; and predicting a dimension conversion difference on basis of correlation between the opening angle and an actual measurement v...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for dimension conversion difference prediction includes: determining an opening angle at a conversion difference prediction point on basis of a design pattern data; and predicting a dimension conversion difference on basis of correlation between the opening angle and an actual measurement value of the dimension conversion difference, or a method for dimension conversion difference prediction includes: determining an incident amount of incident objects at a conversion difference prediction point on basis of a design data; and predicting a dimension conversion difference on basis of correlation between the incident amount and an actual measurement value of the dimension conversion difference. |
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