Fluidized bed reactor for production of high purity silicon

Fluidized bed reactor for production of high purity silicon

Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.

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Bibliographische Detailangaben
Hauptverfasser: Sanchez, Javier San Segundo, Barona, Jose Luis Montesinos, Conejero, Evaristo Ayuso, Canle, Manuel Vicente Vales, Rel, Xavier Benavides, Garcia, Pedro-Tomas Lujan, Martinez, Maria Tomas
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.