Sputtered piezoelectric material
1.00+x0.520.481.00−y3yPiezoelectric actuators having a composition of Pb(ZrTi)ONb, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | 1.00+x0.520.481.00−y3yPiezoelectric actuators having a composition of Pb(ZrTi)ONb, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator. |
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