Optical equipment having wavelength-independent optical path division element
Optical equipment for detecting beams emitted from a sample by irradiating the sample with linear polarization according to an aspect of the present invention includes a wavelength-independent optical path division element arranged at a position of coupling of a illumination optical path of the line...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Optical equipment for detecting beams emitted from a sample by irradiating the sample with linear polarization according to an aspect of the present invention includes a wavelength-independent optical path division element arranged at a position of coupling of a illumination optical path of the linear polarization and a detection optical path of the beams, and the linear polarization is reflected by the interface of the optical path division element entered as S polarization and led to the sample, and the beams pass through the optical path division element and are detected. |
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