Optical equipment having wavelength-independent optical path division element

Optical equipment for detecting beams emitted from a sample by irradiating the sample with linear polarization according to an aspect of the present invention includes a wavelength-independent optical path division element arranged at a position of coupling of a illumination optical path of the line...

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Bibliographische Detailangaben
1. Verfasser: Takatsuka, Hirofumi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Optical equipment for detecting beams emitted from a sample by irradiating the sample with linear polarization according to an aspect of the present invention includes a wavelength-independent optical path division element arranged at a position of coupling of a illumination optical path of the linear polarization and a detection optical path of the beams, and the linear polarization is reflected by the interface of the optical path division element entered as S polarization and led to the sample, and the beams pass through the optical path division element and are detected.