CMOS image sensor having a crosstalk prevention structure

+In a method of manufacturing a CMOS image sensor, a P type epitaxial layer is formed on an N type substrate. A deep P type well layer is formed in the P type epitaxial layer. An N type deep guardring well is formed in a photodiode guardring region. The N type deep guardring region makes contact wit...

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Bibliographische Detailangaben
Hauptverfasser: Park, Won-Je, Park, Young-Hoon, Kim, Ui-Sik, Seong, Dae-Cheol, Yoon, Yeo-Ju, Keang, Bo-Bae
Format: Patent
Sprache:eng
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Zusammenfassung:+In a method of manufacturing a CMOS image sensor, a P type epitaxial layer is formed on an N type substrate. A deep P type well layer is formed in the P type epitaxial layer. An N type deep guardring well is formed in a photodiode guardring region. The N type deep guardring region makes contact with the N type substrate and also be connected with an operational voltage terminal. A triple well is formed in a photodiode region and a peripheral circuit region. The triple well is used for forming a PMOS and an NMOS having different operational voltages. An isolation region is formed in the photodiode region. The isolation region in the photodiode region has a depth different from a depth of an isolation region in the peripheral circuit region.