Mass flow rate-controlling apparatus
A mass flow rate-controlling apparatus including a mass flow rate-detecting mechanism a flow rate-controlling valve mechanism and a mechanism for controlling the flow rate-controlling valve mechanism based on a flow rate-setting signal S input from outside and a flow rate signal S, the flow path bei...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A mass flow rate-controlling apparatus including a mass flow rate-detecting mechanism a flow rate-controlling valve mechanism and a mechanism for controlling the flow rate-controlling valve mechanism based on a flow rate-setting signal S input from outside and a flow rate signal S, the flow path being provided with a pressure-detecting mechanism for detecting the pressure of the fluid to output the detected pressure signal, so that the controlling mechanism selectively switches a first control mode for controlling the mass flow rate based on the flow rate signal and the flow rate-setting signal without using the detected pressure signal, and a second control mode for controlling the mass flow rate based on the detected pressure signal, the flow rate signal and the flow rate-setting signal, based on a pressure variation obtained from the detected pressure signal. |
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