Layered scanning charged particle microscope package for a charged particle and radiation detector
A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column package and the sample holder. |
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