Method of manufacturing a process chamber component having yttrium-aluminum coating
A method of manufacturing a substrate processing chamber component comprises forming a chamber component comprising a metal alloy comprising yttrium and aluminum, and anodizing an exposed surface of the metal alloy.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of manufacturing a substrate processing chamber component comprises forming a chamber component comprising a metal alloy comprising yttrium and aluminum, and anodizing an exposed surface of the metal alloy. |
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