Integrated circuit system with carbon and non-carbon silicon

Integrated circuit system with carbon and non-carbon silicon

An integrated circuit system includes a substrate, a carbon-containing silicon region over the substrate, a non-carbon-containing silicon region over the substrate, and a silicon-carbon region, including the non-carbon-containing silicon region and the carbon-containing silicon region.

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Bibliographische Detailangaben
Hauptverfasser: Liu, Jin Ping, Murphy, Richard J, Madan, Anita, Chakravarti, Ashima B
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit system includes a substrate, a carbon-containing silicon region over the substrate, a non-carbon-containing silicon region over the substrate, and a silicon-carbon region, including the non-carbon-containing silicon region and the carbon-containing silicon region.