Target assembly with electron and photon windows

An X-ray target assembly includes a substrate, a target supported by the substrate adapted to generate X-rays when impinged by an electron beam, and an enclosure over the target providing a volume for the target. The enclosure is made of a material substantially transparent to electrons. The volume...

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Bibliographische Detailangaben
Hauptverfasser: Schumacher, Richard, Jensen, David K, Harding, Maynard C, Robinson, Randall D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An X-ray target assembly includes a substrate, a target supported by the substrate adapted to generate X-rays when impinged by an electron beam, and an enclosure over the target providing a volume for the target. The enclosure is made of a material substantially transparent to electrons. The volume is substantially vacuum or filled with an inert gas.