Silicon resonator of the tuning-fork type
The invention relates to a silicon resonator of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base, a plurality of parallel arms capable of vibrating and actuator, wherein the arms include a silicon layer provid...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention relates to a silicon resonator of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base, a plurality of parallel arms capable of vibrating and actuator, wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift. |
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