Method for optical inspection, detection and visualization of defects on disk-shaped objects
A method for optical inspection, detection and visualization of defects on wafers is disclosed, wherein at least one camera acquires images of at least one portion of the wafer relative to a reference point of the wafer, and the Cartesian coordinates of the image data associated with the at least on...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for optical inspection, detection and visualization of defects on wafers is disclosed, wherein at least one camera acquires images of at least one portion of the wafer relative to a reference point of the wafer, and the Cartesian coordinates of the image data associated with the at least one portion of the wafer are transformed into polar coordinates. |
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