Evaporative system for solar cell fabrication

A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate...

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Bibliographische Detailangaben

Hauptverfasser:	Bluck, Terry, Barnes, Michael S, Fairbairn, Kevin P
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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