Evaporative system for solar cell fabrication

A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Bluck, Terry, Barnes, Michael S, Fairbairn, Kevin P
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A plurality of chamber are arranged about a transport chamber. The linear transport chamber may include a linear track supporting robot arms. The robot arms transport substrates to and from the chambers. Each chamber includes a plurality of evaporators, each controlled independently. Each substrate positioned in the chamber is coated from a plurality of the evaporators, such that by controlling the operation of each evaporator independently the formation of the layers and the concentration gradient of each layer can be precisely controlled.