Inertial sensor with dual cavity package and method of fabrication

Inertial sensor with dual cavity package and method of fabrication

Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Berger, William Paul, Collins, Mark Andrew, Frazee, Michael Thomas, Smith, Thad W. (Marc), Anderson, Robert Albert, Knowles, Stuart John, Dragotti, Victor
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.