Metal interconnects for integrated circuit die comprising non-oxidizing portions extending outside seal ring

An integrated circuit includes a substrate; a sealing element spanning a periphery of the substrate that forms a protective boundary for the substrate; a plurality of copper lines spanning the substrate in at least two distinct layers contained within the protective boundary; a first conducting elem...

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Bibliographische Detailangaben
Hauptverfasser: Tan, Liang, Erhardt, Herbert J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit includes a substrate; a sealing element spanning a periphery of the substrate that forms a protective boundary for the substrate; a plurality of copper lines spanning the substrate in at least two distinct layers contained within the protective boundary; a first conducting element disposed outside the sealing element; and one or more second conducting elements connecting at least two of the copper lines and that spans the sealing element; wherein the conducting elements are substantially non-oxidizing metals that are resistant to oxidization and that connect the copper line to the first conducting element.