Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof

A micro-electro-mechanical gyroscope includes a first mass, which is able to oscillate along a first axis with respect to a fixed body, an inertial sensor having a second mass constrained to the first mass so as to oscillate along a second axis in response to a rotation of the gyroscope, a driving d...

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Bibliographische Detailangaben
Hauptverfasser: Prandi, Luciano, Caminada, Carlo
Format: Patent
Sprache:eng
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Zusammenfassung:A micro-electro-mechanical gyroscope includes a first mass, which is able to oscillate along a first axis with respect to a fixed body, an inertial sensor having a second mass constrained to the first mass so as to oscillate along a second axis in response to a rotation of the gyroscope, a driving device coupled to the first mass that forms a control loop for maintaining the first mass in oscillation at a resonance frequency, and a reading device that detects displacements of the second mass along the second axis, which includes a charge amplifier for converting charge packets supplied by the inertial sensor into a charge-integration signal, and a low-pass filter. A calibration stage enables modification of a voltage between the second mass and the fixed body so as to minimize a component at a frequency that is twice the resonance frequency in the charge-integration signal.