Parallelism adjusting mechanism of probe card

1A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card that holds a plurality of probes for electrically connecting a wafer as a test object and a circuitry for generating a signal for a test with respect to the wafer, adjusting screws as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card with respect to a mounting reference surface (S) of a prober for mounting the probe card thereon.