Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same

Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same

3−3−A slurry composition for polishing metal includes a polymeric polishing accelerating agent, the polymeric polishing accelerating agent including a backbone of hydrocarbon and a side substituent having at least one of a sulfonate ion (SO) and a sulfate ion (OSO), and an acidic aqueous solution....

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Bibliographische Detailangaben
Hauptverfasser: Lee, Jong-Won, Han, Sang-Yeob, Hong, Chang-Ki, Yoon, Bo-Un, Lee, Jae-Dong
Format: Patent
Sprache:eng
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Zusammenfassung:3−3−A slurry composition for polishing metal includes a polymeric polishing accelerating agent, the polymeric polishing accelerating agent including a backbone of hydrocarbon and a side substituent having at least one of a sulfonate ion (SO) and a sulfate ion (OSO), and an acidic aqueous solution.