Operating a plasma process
A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps: transferring the at least one signal and/or the data to a plasma process-regulating device and/or to one or more other power supplies or to on...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method for operating one or more plasma processes in a plasma chamber, with at least two power supplies, the method comprising the following process steps: transferring the at least one signal and/or the data to a plasma process-regulating device and/or to one or more other power supplies or to one or more of the arc diverter devices associated with the other power supplies. |
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