Method for bin-based control

A method for providing bin-based control when manufacturing integrated circuit devices is disclosed. The method comprises performing a plurality of processes on a plurality of wafer lots; determining a required bin quantity, an actual bin quantity, and a projected bin quantity; comparing the determi...

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Bibliographische Detailangaben
Hauptverfasser: Wu, Sunny, Shih, Chih-Sheng, Tsen, Andy, Wang, Jo Fei, Mou, Jong-I, Kuan, Hsin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for providing bin-based control when manufacturing integrated circuit devices is disclosed. The method comprises performing a plurality of processes on a plurality of wafer lots; determining a required bin quantity, an actual bin quantity, and a projected bin quantity; comparing the determined required bin quantity with the determined actual bin quantity and determined projected bin quantity; and modifying at least one of the plurality of processes on the plurality of wafer lots if the determined actual bin quantity and determined projected bin quantity fail to satisfy the determined required bin quantity.