Cleaning apparatus

A cleaning apparatus includes a first liquid supply unit, second cylinder, cleaning unit, third cylinder, second liquid supply unit, first cleaning liquid supply unit, and controller. The first liquid supply unit supplies a transfer liquid to a first cylinder. The second cylinder performs transfer t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Saito, Hirofumi, Nakamura, Yoshihito, Matsukawa, Akihiro, Nakamura, Katsuhisa, Asami, Masaaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A cleaning apparatus includes a first liquid supply unit, second cylinder, cleaning unit, third cylinder, second liquid supply unit, first cleaning liquid supply unit, and controller. The first liquid supply unit supplies a transfer liquid to a first cylinder. The second cylinder performs transfer to one surface of a transfer target body with the transfer liquid transferred from the first cylinder. The cleaning unit cleans the circumferential surface of the second cylinder in contact with it. The third cylinder is arranged to oppose the second cylinder and performs transfer to the other surface of the transfer target body. The second liquid supply unit supplies the transfer liquid to the third cylinder. The first cleaning liquid supply unit supplies a cleaning liquid to at least one of the first cylinder and the third cylinder. The controller controls the control unit to clean the second cylinder while the second cylinder is in contact with the first cylinder and the third cylinder.