Semiconductor probe having wedge shape resistive tip and method of fabricating the same

A semiconductor probe having a wedge shape resistive tip and a method of fabricating the semiconductor probe is provided. The semiconductor probe includes a resistive tip that is doped with a first impurity, has a resistance region doped with a low concentration of a second impurity having an opposi...

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Hauptverfasser:	Ko, Hyoung-soo, Jung, Ju-hwan, Hong, Seung-bum, Park, Hong-sik, Park, Chul-min
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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