Method of examining aperture diameter of disk substrate having circular aperture in central portion thereof and apparatus thereof

Method of examining aperture diameter of disk substrate having circular aperture in central portion thereof and apparatus thereof

The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter o...

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1. Verfasser: Yamaguchi, Katsunobu
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Sprache:eng
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creator Yamaguchi, Katsunobu
description The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter of the disk substrate, based on whether the sphere passes through the aperture or not. Furthermore, the present invention relates to an examination apparatus thereof.
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title Method of examining aperture diameter of disk substrate having circular aperture in central portion thereof and apparatus thereof
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