Method of examining aperture diameter of disk substrate having circular aperture in central portion thereof and apparatus thereof
The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter o...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter of the disk substrate, based on whether the sphere passes through the aperture or not. Furthermore, the present invention relates to an examination apparatus thereof. |
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