Semiconductor device
A semiconductor device that includes a metal fuse which may be used for redundancy or trimming, allowing for adjustment in the characteristics of a circuit. The fuse includes a disconnecting metal, a plurality of metal-vias that are connected under respective ends of the disconnecting metal, and a p...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A semiconductor device that includes a metal fuse which may be used for redundancy or trimming, allowing for adjustment in the characteristics of a circuit. The fuse includes a disconnecting metal, a plurality of metal-vias that are connected under respective ends of the disconnecting metal, and a plurality of interconnections that connect to the disconnecting metal through respective metal-vias. The disconnecting metal is disconnected by a laser exposure and the metal-vias are located inside of the spot diameter of the laser used for the laser exposure, and are spaced apart from a side surface of the disconnecting metal. The disconnecting metal is formed of a material having a melting point and a boiling point that is lower than the melting point and boiling point of the metal-vias. |
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