Methods and apparatus for improving operation of an electronic device manufacturing system

In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a firs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Raoux, Sebastien, Curry, Mark W, Porshnev, Peter, Fox, Allen
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a first parameter, and providing an instruction related to at least a second parameter of the electronic device manufacturing system wherein the instruction is based on the predicted first parameter. Numerous other aspects are provided.