Method to improve inductance with a high-permeability slotted plate core in an integrated circuit

An inductor structure formed in an integrated circuit is disclosed, and includes a first isolation layer and a first core plate disposed over or within the first isolation layer. The first core plate includes a plurality of electrically coupled conductive traces composed of a conductive ferromagneti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Brennan, Kenneth D, Papa Rao, Satyavolu S, Williams, Byron
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An inductor structure formed in an integrated circuit is disclosed, and includes a first isolation layer and a first core plate disposed over or within the first isolation layer. The first core plate includes a plurality of electrically coupled conductive traces composed of a conductive ferromagnetic material layer. A second isolation layer overlies the first isolation layer and an inductor coil composed of a conductive material layer is formed within the second isolation layer. Another core plate may be formed over the coil. The one or more core plates increase an inductance (L) of the inductor coil.