Imaging device in a projection exposure facility

Imaging device in a projection exposure facility

An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable rel...

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Hauptverfasser: Hummel, Wolfgang, Fischer, Juergen, Aubele, Karl-Eugen, Merz, Erich, Reiner, Raoul, Rief, Klaus, Schoengart, Stefan, Neumaier, Markus, Trossbach, Baerbel, Weber, Ulrich, Muehlbeyer, Michael, Holderer, Hubert, Kohl, Alexander, Weber, Jochen, Lippert, Johannes, Rassel, Thorsten
Format: Patent
Sprache:eng
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Zusammenfassung:An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.