Transmission filter apparatus
A transmission filter apparatus for spatially dependent intensity filtering of an incident light distribution, and illumination systems containing the same. The light transmission filter apparatus contains at least one retardation device that can be operated in transmission for the purpose of produc...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A transmission filter apparatus for spatially dependent intensity filtering of an incident light distribution, and illumination systems containing the same. The light transmission filter apparatus contains at least one retardation device that can be operated in transmission for the purpose of producing a spatially dependent retarding effect on the light of the incident light distribution, it being possible to drive the retardation device in order to produce a temporally variable, spatially dependent retarding effect, and also contains at least one polarization filter arrangement arranged in the light path downstream of the retardation device. An exposure method for a substrate can advantageously be carried out with the aid of an illumination system having such a transmission filter apparatus. |
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